摘要
介绍一种针对并行扫描探针显微镜系统的图像合成算法。利用单探针原子力显微镜(AFM)系统模拟多探针扫描探针显微镜(SPM)并行扫描的图像特征。在图像处理上,将中值滤波器及各种边缘检测算法与成像系统集成在一起,以提高成像质量;同时,依靠原理简单并易于实现的标准化协方差相关法实现相邻探针扫描图像的拼接,采用加权合成算法进行图像的自然融合。实验证明,该算法高效、高精度,合成后的图像与原图相似度达到96%,能够满足并行SPM系统的成像要求。
A type of imaging synthesis arithmetic for parallel SPM was studied.The scanning images＇ characteristics of multi-probe parallel SPM were simulated by simple probe AFM system.On image processing,medial filter and various edge detections were integrated into imaging system in order to improve imaging quality.Scanned pictures caught by adjacent probes were stitched by related coefficient arithmetic which is simple on principle and easy to achieve.Images were blended naturally by weighting combination arithmetic.This efficient and highly accurate arithmetic is proven to satisfy the imaging requirement.The similarity between image after synthesis and original image can achieve to be 96%.
出处
《现代制造工程》
CSCD
北大核心
2010年第9期4-7,共4页
Modern Manufacturing Engineering
基金
国家自然科学基金资助项目(50805137)
