摘要
为了描述飞秒激光与金属薄膜相互作用过程中的非平衡传热现象,采用有限差分的方法对金属薄膜内的温度场进行了1维数值模拟。对双温模型中电子-晶格耦合系数G、激光脉宽和电子的弹道运动等因素对金属薄膜表层电子和晶格温度的影响进行了理论分析。结果表明,G影响材料表面电子的温升,电子和晶格温度平衡时的延迟时间随着G的增大而减小,二者呈指数变化关系。这一结果对改善半导体元件中薄膜的温升是有帮助的。
To describe the non-equilibrium phenomenon in interaction between the metal thin film and femtosecond laser, the temperature field of metal film was simulated by means of finite-difference method. The effects of electron-lattice couple coefficient G, pulse width and electrical ballistic contribution on surface temperature of metal film were analyzed. The results show that G determines the surface temperature rising rate and electron-lattice couple time decreases exponentially with the increase of G. The result is helpful to improve the temperature rise of thin films in the semiconductor.
出处
《激光技术》
CAS
CSCD
北大核心
2010年第5期708-711,共4页
Laser Technology
关键词
超快光学
非平衡
双温模型
金属薄膜
uhrafast optics
non-equilibrium
double-temperature function
metal film
