摘要
本文采用电子背散射衍射(EBSD),测量纳米异质外延层的织构,及外延层与衬底的晶体取向匹配。测试的材料包括作为YBCO超导膜的过渡层、生长在强立方织构Ni-5at.%W(Ni-W)衬底上的La2Zr2O7(LZO)外延层,及LED器件中生长在蓝宝石衬底上的GaN过渡层和外延层。EBSD测量出LZO外延层具有旋转立方织构,显示出LZO与Ni-W衬底的面内取向(转动45°)及面外取向(沿[001]方向)的匹配关系。EBSD测量出GaN过渡层与蓝宝石衬底的面内取向(转动30°)的匹配关系,显示出由GaN过渡层的晶格畸变而引入的平行于外延生长方向的弹性应变梯度(约500 nm)。
The electron backscatter diffraction(EBSD) was used to measure textures and correlations of crystal orientations between nano-scaled heteroepilayers and substrates.The measured materials include La2Zr2O7(LZO) buffer layer as YBCO superconductor films deposited on a Ni-5at.% W(Ni-W) substrate with a strong cube texture,as well as GaN buffer layers and GaN epilayer grown on a sapphire substrate in LED devices.The EBSD was used to measure a rotated cube texture of the LZO epilayer and to reveal its relative orientation in-plane(45° rotation) and out of plane direction(towards[001]direction) with its Ni-W substrate.The relative orientation of GaN buffer in-plane(30° rotation) with its sapphire substrate was measured to reveal an elastic strain gradient parallel to epitaxial growth direction((500 nm) resulted from the lattice distortation in GaN buffer layer.
出处
《电子显微学报》
CAS
CSCD
北大核心
2010年第4期322-327,共6页
Journal of Chinese Electron Microscopy Society
基金
国家973资助项目(No.2009CB623700)
国家973资助项目(No.2006CB601005)
北京市自然科学基金资助项目(No.2072004)