ITO薄膜导电性能对温度的响应

Effect of Temperature on Conductive Properties of ITO Films

以无机盐为原料,采用溶胶-凝胶法制得透光导电ITO薄膜。用温度控制器改变ITO薄膜温度,用SZT-2四探针测试仪测膜的方阻。结果表明:在温度的循环变化过程中,ITO薄膜的方阻随着温度的上升而降低,在温度降低时沿原曲线返回,且重演性好,高温时电阻响应的灵敏度较大,可在使用过程中起到温度的传感作用。

The transparent and conductive ITO thin films are prepared by sol-gel method using inorganic salts as raw materials.The temperature of ITO thin films is changed by temperature controller.The sheet resistance is tested by four-probe-method.The result shows that the sheet resistance of ITO thin films reduces generally with increasing temperature of ITO thin film among the circulation.It goes back over its course with decreasing temperature,and its repeatability is good.The sensitivity of sheet resistance response is high at high temperature,this can act as transmission of temperature.