摘要
文章介绍了膜厚类测试仪比对方法的设计、比对结果的处理及比对周期的选取等,给出了台阶仪和光谱型膜厚测量仪的实际结果。该方法也适用于其他仪器的比对,并给出了比对中应注意的问题。
This paper introduces the design of comparison method for film thickness instruments, the method of pro- cessing comparison results and how to select comparison period, gives the results of spectrum film thickness instruments and steppers. This method is also suitable for other instruments. It gives the problems that we shoud pay attention to during comparison.
出处
《计算机与数字工程》
2010年第9期49-51,76,共4页
Computer & Digital Engineering
关键词
比对
膜厚
标准
comparison, film thickness, standard
