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DMD并行光刻制作微透镜阵列提高有机发光二极管的耦合效率

Microlens arrays fabricated by DMD parallel lithography for OLED out-coupling efficiency enhancement
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摘要 分析了半球形微透镜阵列提高有机发光二极管耦合效率的特性,利用光线追迹法对其进行了模拟仿真.利用DMD并行光刻和热熔法结合制作了不同口径的球冠状微透镜阵列模板,通过电铸和UV压印制作了微透镜阵列薄膜.并将其附在有机发光二极管玻璃基底表面,测量其光亮度.实验结果表明,在垂直基底方向上,微透镜阵列薄膜可将光亮度提高42%. The performance of OLED with microlens arrays film is discussed.Numerical simulation of OLED with microlens arrays film based on Monte Carlo ray-tracing method is presented.The microlens arrays mold is fabricated by digital micro-mirror device（DMD） based parallel lithography and the thermal reflow method.MLAF is obtained by electroplating and UV imprinting techniques.Finally apply the MLAF on the glass bottom of OLED and measure the enhancement factor.Both simulation and experimental results show that the luminance in normal direction of OLED attached with a spherical microlens arrays film is improved by 42%.
作者 周芳 庄孝磊 申溯 陈林森
机构地区 苏州大学信息光学工程研究所
出处 《苏州大学学报（自然科学版）》 CAS 2010年第3期61-65,共5页 Journal of Soochow University(Natural Science Edition)
基金 江苏省基础研究计划项目(BK20082766) 苏州市科技专项项目(ZXG0802)
关键词 DMD并行光刻 光刻胶热熔法 微透镜阵列薄膜 有机发光二极管 DMD-based parallel lithography thermal reflow microlens arrays film OLED
分类号 TN205 [电子电信—物理电子学] TN303 [电子电信—物理电子学]
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参考文献10

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二级参考文献14

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共引文献6

苏州大学学报（自然科学版）
2010年 第3期

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