摘要
条纹图像的相位提取在现代干涉测量中起着十分重要的作用。从算法原理、研究现状和适用范围等几个方面对比分析了现有的几种条纹图像的相位提取方法,包括相移法、载波法和基于经典算法的相位提取方法。经分析发现,相移法理论上具有较高的解调相位精度,但需获得多幅不同相位的条纹图和保持机械稳定性,这使得其只适用于静态或准静态干涉测量;而在瞬态或动态干涉测量中,载波法能从单幅图像中获得相位,自动化程度高,且对外界环境要求低,适用于开放条纹;基于经典算法的相位提取方法通过评价函数的设计及参数优化来获得相位,但处理时间相对过长,适用于封闭条纹。综合分析,载波法具有更广泛的应用前景。
The phase extracting from fringe patterns plays a very important role in the modern interferometry. Several methods of the phase extracting from fringe patterns are compared and analyzed from the algorithm principle, development status and application scope respectively, including the phase shifting method, the method based on carrier and the phase-extracting method based on classical algorithm. The phase shifting method has a high demodulate precision of the phase in theory, but requires several fringe patterns with different phases and maintaining stable mechanical stability, so it is only suitable for the static or quasi-static measurement. In the tran- sient or dynamic measurement, the method based on carrier can obtain the phase from the single fringe pattern, and has high automatism and low environment requirement. It is suitable for the opening fringe. The phase extracting method from fringe patterns based on the classical algorithm can obtain the phase through the design of the cost function and the optimization of the parameters, but the computation time is longer relatively. It is suitable for the closed fringe. Based on the comprehensive analysis, the method based on carrier has a wide application prospect.
出处
《微纳电子技术》
CAS
北大核心
2010年第9期573-579,共7页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(60976077)
关键词
干涉测量
条纹图像
相位提取
开放条纹
封闭条纹
interferometry
fringe patterns
phase-extracting
opening fringe
closed fringe