摘要
采用蒸发诱导自组装工艺制备了TiO2-SnO2介孔金属氧化物薄膜。采用静态配气法,研究了不同掺杂量SnO2对TiO2元件气敏性的影响,并通过测定电化学阻抗谱,分析了介孔金属氧化物的气敏机理。结果表明:随着SnO2掺杂量的增加,TiO2元件对乙醇气体灵敏度也随之提高,而初始响应温度则随之降低。在250℃时,20%-TiO2和SnO2元件对体积分数为500×10-6乙醇的灵敏度分别为13.24和14.26。阻抗分析表明:复合氧化物对还原性气体敏感过程具有明显容抗特征。
Mesostructured TiO2-SnO2 thin films are successfully prepared on slide glass by evaporation-induced self-assembly process. The gas sensing properties of TiO2-SnO2 thin films fabricated on alumina ceramic tube are measured by a stationary state gas distribution method. The results indicate that with the increase of tin-doped the sensitivities of the TiO2 sensors toward alcohol increase, while the initial response temperatures decrease. At the temperature of 250 ℃, the sensitivities of 20 %-TiO2 and SnO2 sensors toward alcohol （500 × 10^-6） are 13.24 and 14.26, respectively. From analysis of the impedance changes, the metal oxide exhibits obvious capacitance characteristic when it is exposed to reducing gas.
出处
《传感器与微系统》
CSCD
北大核心
2010年第9期8-11,共4页
Transducer and Microsystem Technologies
