基于微振动马达的无阀微泵的研究

Study on valveless micropump based on micro-vibration motor

研制了一种可在低电压下工作的新型无阀微泵,该微泵利用有机玻璃(PMMA)制作泵腔,采用了扩散口/喷口的结构,以PDMS作为振动膜,利用微振动马达作为驱动部件。采用ANSYS软件进行有限元分析得到微泵扩散口/喷口的最佳尺寸。对微泵的振动频率和输出流量进行了测试,结果显示:电压为1.0～1.8 V时,微泵的输出流量随着电压的升高而增加,当电压为1.8～3.3 V时,微泵输出的流量保持稳定,达到150μL/min。该无阀微泵结构简单,驱动电压低,具有良好的性能和低廉的成本。

A novel low voltage actuated valveless micropump is presented. The PMMA is used to fabricate the cavity, and the structure of diffuser and nozzle is adopted in the micropump. The micro-vibration motor is used as the actuator, and the flexible polydimethylsiloxane（PDMS） is used as the vibration membrane. The best size of the diffuser and nozzle is obtained by means of finite element analysis method. The vibration frequency and the flow rate of the micropump are measured, and the result shows that the voltage have significant influence on them. When the voltage ranges between 1.0 -1.8 V, the flow rate has significant increase ; but when the voltage changes between 1.8 - 3.3 V, the flow rate has small change. The maximum flow rate is 150 μL/min. The valveless micropump has simple structure,low driving voltage,low cost and good performance.