可靠性强化试验在硅压力传感器上的应用

Application of Reliability Enhancement Test in Silicon Pressure Sensor

可靠性强化试验是一项不同于传统可靠性模拟实验的激发式试验技术,它的理论依据是故障物理学,通过发现、研究和根治故障达到提高可靠性的目的。文中在对硅压力传感器失效模式和失效机理调研的基础上,对其进行温度、振动可靠性强化试验研究。通过基于传统设备的高温、低温、振动步进及高温、振动恒定试验,使产品设计和工艺缺陷得以暴露,并提出相关改进措施。

Reliability enhancement test （RET）which different from the traditional reliability is a simulation test technology, and the theory is failure physics through discovery, research and cure failure to improve reliability. This paper carried out the tem- perature, vibration reliability enhancement test based on the failure modes and failure mechanism of silicon pressure sensor. The high- temperature, low-temperature, vibration step test and high-temperature, vibration constant test was performed with traditional reliability test equipment, so that the design and process defects of the production were identified, and the improvement method was suggested.