智能微系统力学中的几个问题

Some Problems in Mechanics of Intelligent Microsystems

微电子机械系统（ＭＥＭＳ）和集成微电子机械系统（ＩＭＥＭＳ）近年来的蓬勃发展将为力学学科注入新的活力并为其提供难得的发展机遇。智能微系统力学是研究智能化微系统（包括ＭＥＭＳ、ＩＭＥＭＳ和ＭＯＥＭＳ等）中所涉及到的力学问题，所研究的尺度一般在μｍ／Ｓｕｂμｍ或以下，是微尺度力学和微电子学、物理学、自动控制、精密机械学、摩擦学等的交叉学科。从力学的角度综述了智能微系统力学的特点、所涉及的主要研究领域和目前的一些热门研究问题。

The rapid development of Micro Electro Mechanical Systems(MEMS)and Integrated MEMS(IMEMS)will inject new vitality and supply good opportunity for mechanics.Mechanics of intelligent microsystems studies the mechanical problem in smart microsystems(including MEMS,IMEMS,MOEMS etc.).The dimension is in the order of microns/sub microns or below.It is a crossing discipline among micromechanics,microelectronics,plysics,automatic control,precise mechanism,tribology etc.From the poinf of view of mechanics,this paper briefly summarizes the characteristics,main research fields as well as popular research points in the mechanics of intelligent microsystems.