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抛喷丸表面的多波长散斑自相关法粗糙度测量 被引量:3

Roughness Measurement of Shot-Blasted Surface Based on Polychromatic Speckle Autocorrelation
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摘要 粗糙表面产生的多波长远场散斑图案的散斑延长现象可以用来进行表面粗糙度测量。以抛喷丸表面为研究对象,具体介绍了多波长散斑自相关表面粗糙度测量方法。根据多波长散斑图案的各向同性径向辐射的特征,提出了适用的数字图像处理方法。探讨了局部自相关函数特征长度的选取、数字图像处理过程中的局部窗口尺寸和散斑图像的饱和曝光比等因素对散斑延长效应的影响。通过拍摄和处理每一样品表面多个位置的多波长远场散斑图像,计算了Ra分别为0.4,0.8,1.6和3.2μm的表面样块的光学粗糙度指标值。结果表明,该光学粗糙度指标能很好反映被测表面的粗糙程度。 The speckle elongation effect of speckle pattern produced at the far-field diffraction plane by roughness surface under illumination of polychromatic light can be utilized to measure surface roughness. A roughness measurement of a shot-blasted surface by means of polychromatic speckle autocorrelation is introduced. In consideration of the isotropic radial structure of polychromatic speckle pattern,an appropriate digital image processing algorithm is poposed. Several factors affecting the characteristics of the speckle elongation are discussed,which include the determination of characteristic length of local autocorrelation function,the size of local window for digital image processing,and the exposal saturation ratio of speckle image. By capturing and processing polychromatic far-field speckle images obtained from many points on each sample surface,optical roughness index values of sample surfaces with roughness parameter Ra of 0.4,0.8,1.6 and 3.2 μm are calculated,respectively. It is shown that the optical roughness index can be used in scaling well the roughness degree of sample surfaces.
机构地区 同济大学理学部
出处 《光学学报》 EI CAS CSCD 北大核心 2010年第9期2578-2584,共7页 Acta Optica Sinica
基金 教育部留学回国人员科研启动基金(教外司留[2005]383号)资助课题
关键词 光学测量 表面粗糙度测量 多波长散斑自相关 散斑延长效应 optical measurement surface roughness measurement polychromatic speckle autocorrelation speckle elongation effect
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