摘要
为提高陶瓷球研磨加工效率,提出了一种新的研磨方法,即超声振动研磨法.通过对氮化硅陶瓷球进行超声振动研磨试验表明,该法与传统研磨法相比具有较高的效率,据此提出了M点研磨法与N点研磨法.
In order to improve the efficency of ceramic ball lapping, a new lapping method called ultrasonic vibration lapping is used. This new method is proved more efficient than conventional lapping.Based on the test of silicon nitride ball ultrasonic vibration lapping, M point lapping and N point lapping are used.
出处
《哈尔滨理工大学学报》
CAS
1999年第3期29-33,共5页
Journal of Harbin University of Science and Technology
基金
国家自然科学基金!59835180
关键词
超声振动研磨
氮化硅陶瓷球
陶瓷球
ultrasonic vibration lapping, silicon nitride ball
efficiency