摘要
采用磁控溅射法在Si(100)和石英衬底上沉积Y2Mo3O12,并经退火处理获得正交相Y2Mo3O12薄膜。采用扫描电镜、X射线衍射仪、变温拉曼光谱仪和紫外-可见光谱计研究了薄膜的表面形貌、结晶特性、吸湿性和光吸收性能。结果表明,磁控溅射沉积Y2Mo3O12薄膜为非晶态,退火后结晶为正交相结构。正交相Y2Mo3O12薄膜表面平整、晶粒细小,具有可逆的脱水吸水性能,其光学带隙宽度为4.58eV,对近紫外光(波长286～270nm)具有很好的吸收性能,可应用于日盲探测器中。
The orthorhombic Y2Mo3O12 thin films are successfully prepared on 51（100） and quartz substrates by magnetron sputtering method and annealing, respectively. The surface morphology, microstructure, hygroscopic effect and photo-absorption property of the orthorhombic Y2Mo3O12 films are analyzed by scanning electron microscope （SEM）, X-ray diffractometer （XRD）, Raman spectrometer, and ultraviolet-visible spectrometer（UV-vis）. The resuits indicate that the as-deposited Y2Mo3O12 thin films are amorphous but the annealed thin films are orthorhombic. This orthorhombic Y2Mo3O12 thin film not only shows smooth surface and fine microstructure but also possesses reversible hygroscopic effect and dehydration property. The film has an optical bandgap width of 4. 58eV and a high absorbency for near-ultraviolet. Therefore, it can be applied in solar-blind detector.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2010年第18期8-11,共4页
Materials Reports
基金
河南省教育厅自然科学研究计划(2006140009)
