真空蒸发制备ZnS薄膜及其性能研究

Property Study of ZnS Thin Films Prepared by Vacuum Evaporation

用真空蒸发技术在玻璃衬底上获得了透明ＺｎＳ薄膜．薄膜为立方闪锌矿结构，呈高阻状态，在可见光范围内有较高的的透过率．在不同条件下对薄膜进行了热处理。

Using the vacuum evaporation technique,we evaporated the transmittance ZnS films on glass substrate.The structure of the films contains cubic sphalerite.The films show high resistivity and high transmissivity in visible spectal range.We annealed the flims in different condition and studied the effection of annealing on properities of films.