激光干涉比长仪的新型瞄准方法——提高线纹尺的测量精度

New Aiming Method in Laser Interferometer Improving the Measurement Accuracy of Line Scale

介绍一种在激光干涉仪上对线纹尺进行高精度瞄准的新方法——单狭缝多点采集系统。详细描述了其设计方案和工作原理，并介绍了确定刻线中心位置的计算方法、消除随机噪声的数字滤波法及对钟形曲线进行直线拟合的合适区段。实测数据表明。

A new aiming method in laser interferometer-single slit multisampling system for improving the accuracy of line scale is introduced. The design and principles are described in detail, and the calculating method for determination of the central position is presented.