角度测量型原子间力显微镜

Angle Detection Type Atomic Force Microscope

本文作者采用光学式角度传感器，制作了探针驱动式角度测量型原子间力显微镜（ＡＦＭ），它区别于历来的原子力显微镜信号的位移测量方法，克服了以往测量方法对被测物体的尺寸、重量及扫描速度等的限制。

In this paper, a new type atomic force microscopy (AFM) based on angle measurement with optical angle sensor is introduced. It detects the angular displacement of the microcantilever by driving it to follow the shape of the specimen. This method is different from the traditional methods that detect the displacement of the microcantilever. This method overcomes some limitations of scanning speed and the size and weight of specimen.