低温等离子体对固体材料表面改性的机理分析

THE MECHANICS ANALYSIS OF LOW TEMPERATURE PLASMA INTERACTING ON SOLID SURFACES

详细分析了低温等离子体对固体材料表面的作用特点、过程及机理，为低温等离子体在材料表面改性方面的应用提供了理论依据。

This paper analysis the peculiarity, the process and mechanism of low temperature plasma interacting on solid surfaces, and provides the theoretical basis for low temperature plasma in its application to the material surface treatment.