倾斜磁控溅射低温沉积ZnO∶Al薄膜及其光电性能的研究

Optical and electrical properties of ZnO:Al films prepared by tilted magnetron sputtering at low temperature

利用直流-射频共溅射法在玻璃基底上低温制备了系列掺铝氧化锌(ZAO)透明导电薄膜。研究了低温溅射过程中倾斜溅射靶偏角对样品电学性能、紫外-可见-近红外光区透过率、X射线衍射谱及薄膜表面形貌的影响。结果表明,室温条件下制备的ZAO薄膜具有(002)择优取向,当靶偏角为23°时,薄膜方块电阻最低,可达17Ω/□,电阻率为2.2×10-3Ω·cm,可见光平均透过率在85%以上,最高可在95%以上。紫外截止和近红外反射效果明显。

Aluminum-doped zinc oxide（ZAO）thin films were synthesized via a DC-RF co-sputtering on glass substrates at room temperature.This paper studied the impact of tilt angle of the target on the electrical and optical properties,UV-visible-near infrared area transmittance,X-ray diffraction and surface morphology of the samples.The results show that when the target angle is 23°,the ZAO films are preferred（002）orientation.The lowest sheet resistance could be obtained,which is 17Ω/□.The resistivity is 2.2×10^-3Ω·cm.The average transmittance is more than 85% in visible range,and the highest could be more than 95%.UV cut-off and near-infrared reflection effect is obvious.