摘要
为了提高光学系统的成像质量,对离轴抛物面反射镜的面形准确度要求越来越高,这大大增加了反射镜的加工难度.本文基于波像差理论,分析了在离轴抛物面反射镜中调整量引入的波像差,提出通过适当调整离轴抛物面反射镜的位置补偿反射镜的面形误差,可以降低离轴反射镜的加工难度、缩短其加工周期、减少加工成本.并借助于ZEMAX软件对一块面形准确度低于λ/40RMS(λ=632.8nm)离轴抛物面反射镜进行仿真实验,根据理论计算的调整量调整反射镜的位置,得到了补偿后的离轴抛物面反射镜的面形误差小于λ/60RMS,仿真结果表明在离轴抛物面反射镜中引入适当的调整量可以有效地补偿反射镜的面形误差.
In order to improve the imaging quality of optical system, high precision surface of mirrors are put forward to improve their imaging quality. It makes their fabrication harder. Wavefront aberration induced by alignment is analyzed in off-axis parabolic mirror system based on the wavefront aberration theory. The surface error of off-axis parabolic mirror can be compensated by alignment so it will reduce the fabrication difficulty, shorten its period and save its cost. In the simulations of an off-axis parabolic mirror with surface error λ/40 RMS （λ=632.8 nm） （ Root Mean Squre） with ZEMAX software, the figure accuracy is under λ/40 RMS after alignment. It shows that surface error of off-axis parabolic mirrors could be compensated effectively by alignment.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2010年第9期1578-1581,共4页
Acta Photonica Sinica
关键词
非球面加工
面形误差
波像差
调整技术
离轴抛物面镜
Aspheric processing
Surface error
Wavefront
Alignment
Off-axis parabolic mirror
