摘要
不同加工方法所产生的误差会有不同特点,鉴于未见MEMS领域误差特点研究的文献,采用采样设计对比法检测了微型齿轮的齿顶圆半径偏差、齿根圆半径偏差、齿厚偏差和齿形误差。对误差进行的统计表明:LIGA工艺加工微齿轮和微齿轮孔的误差偏向均为负向,且加工微齿轮孔的误差要大于微齿轮,设计复杂孔和轴时预留的单边余量应为15μm。分析表明,这些特点与加工方法导致的误差产生原因是吻合的。
The measurement and analysis of error are of great importance for designing micro gears.However,in the domain of MEMS,there are no available references about the characteristics of error so far.A measuring method was designed by referring to the traditional scale up method for gears in watch and clock.By measuring the parameters like tip circle,root circle and tooth thickness,the actual machining errors were obtained.Statistics showed that the error directions of both micro gears and micro gears＇ hole were negative,and the errors of micro gears were much more than that of micro gears hole.The unilateral margin should be reserved more than 15 m when designing complicate hole and shaft.
出处
《探测与控制学报》
CSCD
北大核心
2010年第4期59-64,共6页
Journal of Detection & Control
