金属离子掺杂的TiO_2-SiO_2增透膜的制备及性能

Preparation and property of metal ion doped TiO_2-SiO_2 antireflective coating

为了得到高增透的TiO2-SiO2薄膜,采用sol-gel法制备了金属离子掺杂的TiO2-SiO2薄膜,并对其透射光谱和薄膜厚度进行了表征,研究了退火温度及不同金属离子掺杂(Al3+、Fe3+和Zn2+)对TiO2-SiO2薄膜增透性能的影响。结果表明:Al3+、Fe3+可提高薄膜在可见光波段的增透性,其中,掺杂Al3+的摩尔分数为0.4%的薄膜,未经退火处理的增透性能最佳(透射率可达98%)。掺杂Fe3+使薄膜的截止波长红移量最大,约为14nm。

In order to gain a kind of high antireflective（AR） coating,metal ion doped TiO2-SiO2 thin films were prepared by the sol-gel method.The transmissive spectra and thickness of obtained AR coating were characterized.And the effects of annealing temperature and different metal ion doping（Al3＋,Fe3＋ and Zn2＋） on the antireflective properties of prepared TiO2-SiO2 thin films were studied.The results indicate that the transmissivity of AR coating at the band of visible light is improved by doping Al3＋ and Fe3＋ ions.Without annealing,the antireflective property of the AR coating doped with 0.4%（mole fraction） of Al3＋ is best（transmissivity：98%）.The cut-off wavelength of the thin film red-shifts most by doping Fe3＋,and the maximum value is about 14 nm.