摘要
为了得到高增透的TiO2-SiO2薄膜,采用sol-gel法制备了金属离子掺杂的TiO2-SiO2薄膜,并对其透射光谱和薄膜厚度进行了表征,研究了退火温度及不同金属离子掺杂(Al3+、Fe3+和Zn2+)对TiO2-SiO2薄膜增透性能的影响。结果表明:Al3+、Fe3+可提高薄膜在可见光波段的增透性,其中,掺杂Al3+的摩尔分数为0.4%的薄膜,未经退火处理的增透性能最佳(透射率可达98%)。掺杂Fe3+使薄膜的截止波长红移量最大,约为14nm。
In order to gain a kind of high antireflective(AR) coating,metal ion doped TiO2-SiO2 thin films were prepared by the sol-gel method.The transmissive spectra and thickness of obtained AR coating were characterized.And the effects of annealing temperature and different metal ion doping(Al3+,Fe3+ and Zn2+) on the antireflective properties of prepared TiO2-SiO2 thin films were studied.The results indicate that the transmissivity of AR coating at the band of visible light is improved by doping Al3+ and Fe3+ ions.Without annealing,the antireflective property of the AR coating doped with 0.4%(mole fraction) of Al3+ is best(transmissivity:98%).The cut-off wavelength of the thin film red-shifts most by doping Fe3+,and the maximum value is about 14 nm.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2010年第9期13-15,共3页
Electronic Components And Materials
基金
国家大学生创新性实验计划资助项目(国字081069706)
西北大学校级大学生创新实验计划资助项目(校字200815)
西北大学研究生交叉学科资助项目(No.08YJC14)
国家自然科学基金资助项目(No.20876125)