微机械中新型压电微电机致动机理分析

Analysis of Micro Piezoelectric Motor Drive Theory in MEMS

给出了一种结构简单、易于微型化的新型压电微电机，研究了其致动机理．利用压电学和振动学理论分析了定子各部分及系统的振动位移微分方程；借助于弹性力学和振动分析理论，在分析新型压电微电机的基础上，建立了压电微电机运动学和动力学模型．该模型可用于压电微电机运动过程实验和压电微电机的优化设计中．

A new kind of piezoelectric micromotor was shown. This kind of micro piezoelectric motor has a simple structure and is easy to be miniaturized. Based on the piezoelectric theory, mechanical vibration and elasticity mechanics, this paper analysed this piezoelectric micromotor vibrators and investigated its work principle. A mathematical model of piezoelectric micromotor in kinematics and dynamics was established, which set up the theory foundation for the piezoelectric micromotor's structure optimization.