摘要
微平面间黏着力对微机电系统(MEMS)非常重要,常是决定其能量损耗乃至寿命长短的最主要因素.MEMS中的黏着力主要来源之一就是介于两互相接触平面间的弯月面力.弯月面力主要取决于相互接触的两平面间形成的弯月面形状.本文通过分析两微小平面在分离过程中弯月面形状的变化,得到在不同表面亲水/疏水性能、初始液面高度、分离距离等条件下的弯月面形状,计算得出在不同初始条件下断裂高度和弯月面力的数值以及随之变化的规律,为MEMS的性能分析和寿命计算提供依据。
The adhesive force between microsurfaces is very important to microelectric mechanical system（MEMS）,being always a key factor that detemines the energy dissipation and even the life span.In MEMS,the meniscus force mainly depends on the meniscus shape formed between the contact surfaces.This paper analyzes the meniscus shape changes during the seperation of two microsurfaces.Different meniscus shapes were obtained as a result of different hydrophilic /hydrophobic properties,initial liquid heights and separate distances and so on.The fracture height,the meniscus force value and their change rules in different initial conditions are obtained by numerical simulation,which provides a basis of the MEMS performance analysis and life span calculation.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2010年第10期6902-6907,共6页
Acta Physica Sinica
基金
国家自然科学基金(批准号:50705006)
北京市自然科学基金(批准号:3082015)资助的课题~~
关键词
微机电系统
黏着力
表面能
弯月面力
micro-electric mechanical system
adhesive force
surface energy
meniscus force
