摘要
阐述了大角度离子注入机的束流自动调节,着重描述了新建立菜单的第一次调束,从束流的引出到固定法拉第杯获得目标束流的具体调节步骤,包括束流的均匀性检测的全部过程,另外对调束过程中的一些算法也进行了细致的介绍。
This paper expounds the tuning beam with automation of the large tilt ion implanter control system,in particular,expatiates the first tuning beam for the new recipe,in detail lists the material tuning step from extracting beam to geting the target beam at the setup faraday,include that the all process how to check the beam uniformity,otherwise,Specially introduces several arithmetic in beam process.
出处
《电子工业专用设备》
2010年第9期17-22,共6页
Equipment for Electronic Products Manufacturing
