蠕动泵原理及在化学机械抛光过程中的应用

The Peristaltic Pump's Work Theory and its Application in the Chemical Mechanical Polishing Process

主要分析了蠕动泵的组成和工作原理,描述了蠕动泵在化学机械抛光过程中的应用特点和优势。详细介绍了蠕动泵在应用过程中的控制方法和选用注意事项。

This article analyses the Peristaltic Pump＇s configuration and working principle,introduced its applying characteristic and advantage in the chemical mechanical polishing process.In addition,this article expounds the controlling and choosing ways and means when applying the Peristaltic Pump.