摘要
采用等离子体增强化学气相沉积(PECVD)技术,在聚碳酸酯(PC)树脂片上沉积类金刚石(DLC)薄膜,以获得耐磨性和透光性良好的光学镜片。研究了薄膜的沉积工艺对PC基体镀DLC薄膜耐磨性和透光性的影响。结果表明:PC树脂片上沉积DLC薄膜后,耐磨性有极大的提高,摩擦系数降低了70%左右,显微硬度增加了约30%且随着沉积时间增加而增加,但透光率由约90%降至80%～70%。薄膜样品的耐磨性和透光性与样品的粗糙度、形貌及组成有关。
Diamond-like carbon（DLC） films with good abrasion resistance and high transmittance were deposited on polycarbonate（PC） by plasma-enhanced chemical vapor deposition（PECVD）.The effects of technological parameters on properties were investigated.The results show that the abrasion resistance can be improved greatly after the DLC film deposited on the PC resin.The friction coefficient has a decrease of 70%.The microhardness has an increase of about 30% and increases with the increase of deposited time.The transmittance has been reduced about from 90% to 80%～70%.The abrasion resistance and transmittance of film have close relation to the roughness,appearance and ingredient.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2010年第4期1-4,共4页
Surface Technology
基金
863计划项目资助(2007AA021907)
