半导体光电探测器光谱灵敏度的测试

Testing of Spectral Sensitivity of Semiconductor Photodetectors

对半导体光电探测器光谱灵敏度的测试原理进行分析研究，就研制的１套波长范围为０４～１１μｍ的采用双光路替代法，可以测试半导体光电探测器的光谱灵敏度和量子效率的光谱灵敏度测试装置进行了分析，该装置在测试过程中可以减小光源不稳定性对测试结果的影响，可以测试相对光谱灵敏度、绝对光谱灵敏度，还分析了影响该装置测试精度的一些因素。

Analytical research is made in this paper on the testing principle of the spectral sensitivity of semiconductor photodetectors.A device using a double optical path system is developed to test the spectral sensitivity with wavelength ranging from 0 4 to 1 1μm.This device can be used to test the relative spectral sensitivity,the absolute spectral sensitivity,the quantum efficiency and eliminate the effect of unstability of source on test results.