Supercritical carbon dioxide process for releasing stuck cantilever beams
Supercritical carbon dioxide process for releasing stuck cantilever beams
摘要
The multi-SCCO2 (supercritical carbon dioxide) release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results show that stuck cantilever beams were held up again under SCCO2 high pressure treatment and the repeatability of this process is nearly 100%.
The multi-SCCO2 (supercritical carbon dioxide) release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results show that stuck cantilever beams were held up again under SCCO2 high pressure treatment and the repeatability of this process is nearly 100%.
基金
Project supported by the National Natural Science Foundation of China(No.60976017)
参考文献12
-
1Xua S, Mutharasan R. A novel method for monitoring masschange response of piezoelectric-excited millimeter-sized cantilever (PEMC) sensors. Sensors and Actuators B, 2009, 143(1): 144.
-
2Xiao Dingbang, Wu Xuezhong, Hou Zhanqiang, et al. High- performance micromachined gyroscope with a slanted suspension cantilever. Journal of Semiconductors, 2009, 30(4): 044012.
-
3Lee H C, Park J H, Park Y H. Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever. Sensors and Actuators A, 2007, 136(1): 282.
-
4Maboudian R, Carraro C. Surface chemistry and tribology of MEMS. Annual Review of Physical Chemistry, 2004, 55:35.
-
5Rollot Y, Regnier S, Guinot J C. Simulation of micromanipulations: adhesion forces and specific dynamic models. International Journal of Adhesion and Adhesives, 1999, 19(1): 35.
-
6Mastrangelo C H, Hsu C H. Mechanical stability and adhesion of microstructures under capillary forces-part Ⅰ: basic theory. J Microelectromechan Syst, 1993, 2(1): 33.
-
7Lin M J. Sticking effect on cantilever beam with wetting length of liquid less than beam length after spinning drying. International Microsystems, Packaging, Assembly Conference, Taiwan, 2006: 1.
-
8Lin M J, Chen R. Sticking effect on center-anchored circular plates in microstructures. IEEE Trans Cornpon Packaging Technol, 2001, 24(4): 645.
-
9Park J S, Park H D, Kang S G. Fabrication and properties of PZT micro cantilevers using isotropic silicon dry etching process by XeF2 gas for release process. Sensors and Actuators A, 2005, 117(1): 1.
-
10http://tousimis.com/detail.php3?Pid=8785 C&menu=0.
-
1柳伯平.超临界二氧化碳在混凝土中的研究与应用[J].宁夏科技,1998(2):37-38. 被引量:1
-
2杨文芳,张之秋,苏志武.超临界CO_2处理对PLA纤维微结构和性能的影响[J].印染,2008,34(16):4-7. 被引量:3
-
3庞浩.地面振击解除卡钻的研究[J].工程机械,2000,31(8):13-14.
-
4刘彬,王永波.XX河定向钻穿越卵砾石地层施工技术浅析[J].非开挖技术,2011(2):44-46. 被引量:7
-
5关新杰,张海燕.微胶囊技术在染整工艺中的应用[J].染整技术,2011,33(6):8-11. 被引量:5
-
6李忠东.斯德哥尔摩:传统建筑古色古香[J].房地产评估,2009(3):20-23.
-
7李忠东.斯德哥尔摩:传统建筑古色古香[J].房地产评估,2009,0(6):28-31.
-
8纪俊玲,汪信.微胶囊化染料及其在纺织上的应用技术[J].纺织学报,2006,27(10):112-116. 被引量:9
-
9张梦星,高晶,王富军,王璐,薛海军.酸性染料微胶囊的研究与应用进展[J].毛纺科技,2016,44(3):32-36. 被引量:2
-
10关新杰,张海燕.微胶囊技术在染整工艺中的应用[J].纺织科技进展,2011(2):21-23. 被引量:3