原子力显微镜和扫描隧道显微镜兼容系统的研制

A Compatible Atomic Force and Scanning Tunneling Microscope System

扫描隧道显微镜（ＳＴＭ）和原子力显微镜（ＡＦＭ）由于具有原子量级的分辨率，所以在表面物理、化学、生物等领域得到了越来越广泛的应用．但是，扫描隧道显微镜只能观察导电样品，这就限制了它的应用范围．原子力显微镜尽管能观察导电和非导电样品，然而一般需要另外一套设备．文中介绍了一个自制的新系统，它既可用作ＳＴＭ，同时又可作为ＡＦＭ．实验表明，该系统已经达到ｎｍ量级的分辨率，还有可能进一步提高到原子量级的分辨率．

Scanning tunneling microscope(STM) and atomic force microscope (AFM) have been widely used in the fields of surface physics, chemistry, biology etc., because they both yield resolution at the atomic scale level. The former requires the samples to be conductive while the latter applies to both conductive and nonconductive samples. The proposed system could replace with STM and AFM with nano scale resolution while further refinement can be made to include the atomic level.