Zr_(1-x)Si_xN纳米涂层的制备及其力学性能

PREPARATION AND MECHANICAL PROPERTIES OF Zr_(1-x)Si_xN NANO-COATINGS

采用直流与射频共溅射技术制备Zr1-xSixN纳米涂层。通过改变Si靶溅射功率控制涂层中Si含量,研究了不同Si含量对Zr1-xSixN涂层的物相结构、晶粒尺寸、硬度和摩擦磨损性能的影响,探索了Zr1-xSixN纳米涂层的致硬机理。结果表明:Si的掺入影响Zr1-xSixN涂层的择优取向和相结构,随着Zr1-xSixN涂层中Si含量的增加,涂层截面的形貌由柱状晶转变为非柱状等轴晶,其结构的变化为:固溶体→nc-ZrN/α-Si3N4结构→非晶结构。涂层的晶粒尺寸在12～30nm之间。对于Si含量低于3.14%(摩尔分数)的Zr1-xSixN涂层,由于固溶强化作用使硬度随Si含量增加而增大,对于Si含量高于3.14%的Zr1-xSixN涂层,通过晶粒的转动和原子在晶界的移动能产生塑性形变,提高了涂层塑性形变能力,使得硬度下降。Zr1-xSixN涂层的耐磨损性能随Si含量的增加而增强。

Zr1-xSixN nano-coatings were deposited by direct current and radio frequency co-sputtering from zirconium and silicon.The Si contents in the Zr1-xSixN coating were varied by changing the power applied to the Si target.The influences of Si content on the phase structure,composition,crystal sizes,hardness and tribological properties of Zr1-xSixN coatings were investigated,and the hardening mechanism of the coatings was explored.The results show that the addition of Si significantly affects the orientation and phase structure of Zr1-xSixN coatings.When Si content increased,the cross-section morphology of the coating changes from column structure to non-column structure,the microstructure changes from solid solution to nc-ZrN/α-Si3N4,and then to amorphous.The grain size in the coating is from 12 to 30 nm.When Si adding content is lower than 3.14% in mole,its hardness of Zr1-xSixN coatings increases with the increase of Si content,which is taken as the result of solid solution hardening;while for Zr1-xSixN coatings with the Si contents higher than 3.14% in mole,as a result of atomic sliding in the grain boundaries and grain rotation,its hardness decreases with the increase of Si content.The coatings with higher Si contents have better wear resistance.