摘要
采用直流与射频共溅射技术制备Zr1-xSixN纳米涂层。通过改变Si靶溅射功率控制涂层中Si含量,研究了不同Si含量对Zr1-xSixN涂层的物相结构、晶粒尺寸、硬度和摩擦磨损性能的影响,探索了Zr1-xSixN纳米涂层的致硬机理。结果表明:Si的掺入影响Zr1-xSixN涂层的择优取向和相结构,随着Zr1-xSixN涂层中Si含量的增加,涂层截面的形貌由柱状晶转变为非柱状等轴晶,其结构的变化为:固溶体→nc-ZrN/α-Si3N4结构→非晶结构。涂层的晶粒尺寸在12~30nm之间。对于Si含量低于3.14%(摩尔分数)的Zr1-xSixN涂层,由于固溶强化作用使硬度随Si含量增加而增大,对于Si含量高于3.14%的Zr1-xSixN涂层,通过晶粒的转动和原子在晶界的移动能产生塑性形变,提高了涂层塑性形变能力,使得硬度下降。Zr1-xSixN涂层的耐磨损性能随Si含量的增加而增强。
Zr1-xSixN nano-coatings were deposited by direct current and radio frequency co-sputtering from zirconium and silicon.The Si contents in the Zr1-xSixN coating were varied by changing the power applied to the Si target.The influences of Si content on the phase structure,composition,crystal sizes,hardness and tribological properties of Zr1-xSixN coatings were investigated,and the hardening mechanism of the coatings was explored.The results show that the addition of Si significantly affects the orientation and phase structure of Zr1-xSixN coatings.When Si content increased,the cross-section morphology of the coating changes from column structure to non-column structure,the microstructure changes from solid solution to nc-ZrN/α-Si3N4,and then to amorphous.The grain size in the coating is from 12 to 30 nm.When Si adding content is lower than 3.14% in mole,its hardness of Zr1-xSixN coatings increases with the increase of Si content,which is taken as the result of solid solution hardening;while for Zr1-xSixN coatings with the Si contents higher than 3.14% in mole,as a result of atomic sliding in the grain boundaries and grain rotation,its hardness decreases with the increase of Si content.The coatings with higher Si contents have better wear resistance.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2010年第10期1886-1890,共5页
Journal of The Chinese Ceramic Society
基金
国家科技支撑计划(2007BAE05B04)资助项目
关键词
氮化硅锆涂层
硬度
摩擦因数
磨损性能
zirconium silicon nitride coatings
hardness
friction factor
abrasion property