193nm深紫外固体激光技术探索

Feasibility research of 193nm deep ultraviolet solid state laser technology

对193 nm深紫外激光技术实现途径进行了系统地分析,提出了一种可获得高重复频率、高光束质量的深紫外固体激光技术途径,分析了涉及的关键技术,对实用化深紫外固体激光源的研制具有一定的参考价值。

In this paper,the way of obtaining 193 nm deep ultraviolet laser is analyzed,and a LD pumped solid state laser system by harmonic generations is reported,which has narrow line width,high repetition rate and high beam quality,and is some valuable to make small size and practical 193nm deep ultraviolet solid-state laser.