MOEMS低频声传感器的设计与实验研究

Design and experimental research of the MOEMS low frequency sensor

MOEMS声传感器是MEMS技术、微光学技术、声传感技术相结合发展的新一代声音传感技术,具有灵敏度高、抗电磁场和射频干扰等优点。针对水下潜艇对空声预警涉及的高灵敏度、低频响应好、微型化声传感器整列,研究了反射光强度调制型MOEMS低频声传感阵元。对MOEMS低频声传感器膜片的振动特性进行了有限元分析,得出振动膜片的几何参数,并对反射光强特性进行了仿真和实验。采用设计的MEMS膜片、850 nm波长的LED光源设计并制作了MOEMS低频声传感器样机,通过实验表明,该传感器低频响应好,灵敏度可达200 mV/Pa,达到了设计要求。

The MOEMS acoustic sensor is a new technology which combines acoustic sensor technology with MEMS technology and micro-optics technology.The sensors have high sensitivity and may be used in heavy magnetic,electric fields.In case of warning and detecting antisubmarine aircraft by submarine,the acoustic sensor array which has high sensitivity,good response at low frequency and miniaturized is needed.To meet the requirement,a low frequency MOEMS acoustic sensor based on light intensity modulation is designed.Static performances of membranes with several sizes are simulated with Finite Element modeling,and the parameters of membrane are given out.The characteristic of reflected light intensity is simulated and experimented.The low frequency MOEMS acoustic sensor is made of membrane,the wavelength of the LED is 850 nm.Experiment shows that the sensor has good response in low frequency and its sensitivity is 200 mV/Pa,which reach the aim of the design.