磁场位形对微波ECR等离子体电子参数的影响

The effects of magnetic field configuration on the electron parameters of microwave ECR plasma

测量了两种磁场位形中微波ECR等离子体的电子参数,研究了磁场位形对电子参数空间分布的影响,结果表明:发散场中电子温度在轴心和腔体边缘较大,在过渡的中间区域较小,而磁镜场中电子温度随径向半径R的增大单调减小;电子密度在两种磁场位形中随径向和轴向距离的增大均呈单调下降的趋势,磁镜场中的下降幅度大于发散场;在共振面附近,发散场中气压对电子温度的影响比在磁镜场中大,而气压对电子密度的影响在两种磁场位形中基本相似.

The electron parameters of a microwave electron cyclotron resonance（ECR） plasma operated in two kinds of magnetic field were measured with Langmuir probe.The effects of magnetic field configuration on the spatial distribution of the electron parameters were investigated.The results indicated that： in divergence magnetic field configuration,the electron temperatures at the axial and edge of cylindrical vacuum are higher than that of intermediate area while it decreases monotonically with increasing radius R in a mirror magnetic field.The electron density all decline with increasing the radial and axial distance in the divergence and mirror magnetic field configuration,but the decline extent of mirror field is larger than that of divergence field.The gas pressure has more influence on the electron temperature in divergence magnetic field than in mirror magnetic field at the vicinity of resonance surface,while it has same effect on the electron density in both of the magnetic field.