柱面衍射光栅小转角精密测量方法的研究

Research on Precise Measurement Method of Small Rotation Angle Based on Cylindrical Phase Grating

为了实现小转角测量,采用柱面全息衍射光栅干涉型的方法。此方法用光学机械结构直接保证了2个相差90°的信号,同时在单一的光栅上出现的是单一光扫描场。理论分析证明此测量系统具有包容结构误差性能好的特点,当测量范围±5.11°时,测量精度可达0.199″。

For measuring small rotation angle precisely,a measurement method based on cylindrical phase grating interferometer is developed.In the method,a special optical and mechanical structure is adopted to ensure to get two opto-electric signals with the phase shift of 90°.And more,there is just one optic spot on the only cylindrical phase grating.The method has good ability to tolerance the error of special optical and mechanical structure is proved by theoretical analysis,so the measurement method can have high measuring precision,0.199″,when the angle measuring range is ±5.11°