两级复眼式准分子激光微加工均束器的设计

Design of Fly′s Eye Homogenizer for Excimer Laser Micromachining

介绍了一种两级复眼式均束器的设计。它不仅均匀效果好，传输效率高，输出光束截面尺寸连续可调，而且为掩模投影式准分子激光微加工系统提供了恰当的照明数值孔径，是准分子激光进行微机械、微光学、微电子等微细加工的优良照明系统。

This paper describes a fly′s eye homogenizer for excimer laser micromachining. It has high performance in averaging the strong intensity fluctuations of the incident excimer laser beam and low transmitting loss. The dimension of the output beam can be adjusted continuously.