小型化混合微波集成电路制造技术

Manufacture technology for microwave HIC's.

介绍了小型化混合微波集成电路（ＭＨＭＩＣ）的制造工艺，列举了研制的几种典型的小型化混合微波集成电路（ＭＨＭＩＣ）。与传统的混合微波集成电路（ＨＭＩＣ）相比，ＭＨＭＩＣ具有体积小、重量轻、组装密度高、可靠性高、设计和调试灵活方便等显著优点。

The manufacture technology for microwave HIC's is presented and some newly deve loped microwave HIC's are illustrated. Compare with the typical microwave HIC's, The new ones are more compact, dense, reliable and easier to design and adjust. (3 refs.)