摘要
Plasma absorption probe （PAP） was developed for measuring the electron density in plasmas processing based on the surface-wave characteristics. In order to diagnose the plasma with lower density and higher pressure, a sensitive PAP was also developed. Both types of PAP were analyzed theoretically under the quasi-static approximation, which is highly problematic when a conductor exists in the resonance region of the probe. For this reason, a theoretical model for the PAP is presented in this paper. The model is derived from the electromagnetic wave equation. Its principle is then verified via experiments and numerical simulations. Both experimental and numerical results show that the electromagnetic theoretical model is valid as compared with the quasi-static model. Consequently, a new type of PAP, named as the electromagnetic PAP, is thus proposed for the measurement of electron density.
Plasma absorption probe （PAP） was developed for measuring the electron density in plasmas processing based on the surface-wave characteristics. In order to diagnose the plasma with lower density and higher pressure, a sensitive PAP was also developed. Both types of PAP were analyzed theoretically under the quasi-static approximation, which is highly problematic when a conductor exists in the resonance region of the probe. For this reason, a theoretical model for the PAP is presented in this paper. The model is derived from the electromagnetic wave equation. Its principle is then verified via experiments and numerical simulations. Both experimental and numerical results show that the electromagnetic theoretical model is valid as compared with the quasi-static model. Consequently, a new type of PAP, named as the electromagnetic PAP, is thus proposed for the measurement of electron density.
基金
supported by National Natural Science Foundation of China (Nos.10675121, 10705028 and 10605025)
National Basic Research Program of China (No.2008CB717800)
