摘要
半导体激光端点干涉测长法是利用半导体激光频率调制特性的一种在长度的两个端点干涉测量长度的新方法。本文介绍基于这种测长方法研制的半导体激光端点测长干涉仪实验系统的基本原理、构成、定标方法和测量结果。
The endpoint interferometric length measurement with laser diode is a new length measurement method by using the frequency modulation characteristics of a laser diode and the interferometric measurement is carried out at two endpoints of the measured length.The basic principle,constitution,scaling method and measuring results of the experimental endpoint length measurement interferometer system with laser diode developed based on this method are introduced in the paper.
出处
《光电工程》
CAS
CSCD
1999年第2期5-8,共4页
Opto-Electronic Engineering
基金
中国科学院光电技术研究所所长基金
微细加工光学技术国家重点实验室基金
关键词
激光干涉仪
半导体激光器
长度测量
频率调制
Laser interferometers,Semiconductor lasers,Length measurement,Frequency modulation.
