表面微观形貌测量中光探针大小对测量结果的影响

Effects of Optical Probe Diameter on the Measuring Results of Surface Microtopography

以ＡＦＭ测量的表面微观形貌为基础，采用数值仿真技术，定量地分析光探针直径对表面微观形貌测量的影响。结果表明：评定参数Ｒａ，Ｒｑ，Ｒｙ，Ｒｚ，Ｒｋｕ以及平均轮廓斜率和最大轮廓斜率都随光探针直径的增加而减小，Ｒｓｍ随光探针直径的增大而增大，而Ｒｓｋ不随光探针直径单调变化。

Based on the microtopography derived from AFM measurement, the digital simulation technique is employed to quantitatively analyze influences of optical probe diameter on measurement results of surface microtopography. The results show that the characterization parameters of R a , R q , R y , R z ,R ku , the average profile slope and maximal profile slope will be decreased when the optical probe diameter is increased. On the contrary R sm is increased in the same case and R sk will not monotonously vary with optical probe diameter.