新型隐埋Si/SiO_2做底镜的共振腔型探测器的理论分析
被引量：1
摘要
本文提出一种新型隐埋Ｓｉ／ＳｉＯ２Ｂｒａｇｇ反射器结构的Ｓｉ基共振腔型光电探测器，该结构具有与集成电路相兼容的特点．理论计算表明量子效率较普通光电探测器提高了３～４倍．
基金
"863"计划
国家自然科学重点基金
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3朱育清，博士学位论文，1997年
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1李传波,毛荣伟,左玉华,成步文,时文华,赵雷,罗丽萍,余金中,王启明.Fabrication of SiGe/Si Multi-Quantum Wells Resonant-Cavity-Enhanced Detector[J].Journal of Semiconductors,2004,25(12):1576-1579. 被引量：2
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