光束质量对哈特曼波前探测精度影响的仿真分析

Simulation analysis of influence of beam quality on Hartmann wavefront detection accuracy

哈特曼波前探测器通过探测子孔径光斑质心误差来复原重构被测光束的波前,所以它的测量误差不仅受其自身的结构参数影响,也受被测量光束的光学特征影响。仿真分析表明:当被测光束的波前具有比较多的高阶成分或者哈特曼的微透镜阵列装调不精确时,被测光束强度分布不均匀将会严重影响哈特曼的波前探测误差。

The Hartmann wavefront senor reconstructs the wavefront of the measuring beam by detecting the centroid error of the spot on every subaperture. Therefore the wavefront measurement error is not only affects by its structure parameters, but also affects by the optical characteristics of the measuring beam. The numerical simulation results shows that the non-uniform intensity distribution would seriously affect the wavefront measurement error on condition that the wavefront of the measuring beam has much higher frequency components and the mircrolens array of the Hartmann is not assembled precisely.