摘要
本文采用相对灵敏度因子法,对硅中氧、碳含量的SIMS定量分析方法进行研究。通过对样品进行预溅射的方法,氧、碳的的检测限分别可达到6.0e16atoms/cm^3、2.0e16atoms/cm^3。
The SIMS quantitative analysis method of Oxygen and Carbon Concentration with RSF（relative sensitivity factor） was described in this paper. The detection of Oxygen is 6.0e 16atoms/cm^3 and Carbon is 2.0e 16atoms/ cm^3, respectively by presputtering.
出处
《现代仪器》
2010年第2期40-41,52,共3页
Modern Instruments
