溶胶凝胶法制备Al_2O_3及NF_3分解反应

NF_3 Decomposition Without Water over Al_2O_3 Prepared by Using Sol-gel Method

以硝酸铝为铝源,加入几种结构导向剂,溶胶凝胶法制备了氧化铝前躯体,焙烧制得了比表面积较大的中孔γ-Al2O3,与NF3反应时表现出了较高的反应活性.其中加入PEG-2000为结构导向剂、溶胶凝胶结合超声处理法制备的γ-Al2O3反应活性较高,NF3全转化时间达540 min.

Several Al2O3 precursors have been prepared by a sol-gel method in the presence of different struc-ture directing agents under ultrasonic condition,in which aluminum nitrate is used as aluminum source.After calcinations,the Al2O3 reagents with high surface area and meso-porous structure are obtained,and their de-fluorinated reactivity for NF3 decomposition without water is investigated.The result shows that NF3 can con-vert completely over all the Al2O3 samples at 400 C of reaction temperature,especially NF3 full conversion could maintain for 540 min over the Al2O3 reagent prepared by using PEG-2000 as structural directing agent.