固体紫外摄像器件

UV Solid State Image Sensor

本文介绍新开发的新型紫外固体摄像器—薄型背照式摄像器(BT-CCD)。主要介绍它的结构和特性,也介绍了它目前的水平及其主要的参数。

The paper reports new development of new type solid state UV image Sensor-Thinned Back Illuminated Charge Coupled Device (BT-CCD). The paper is mainly concerned with structure and character, as well as the parameter of the BT-CCD image Sensor.