摘要
研制了掺有不同质量分数La2O3的SnO2复合薄膜,并测定了该薄膜和各种挥发性有机物饱和蒸气接触前后的的吸光度变化,其中含有3.0%La2O3的SnO2薄膜在氯苯蒸气气氛中的吸光度变化较大。选用3.0%La2O3的SnO2复合薄膜作为敏感试剂固定在Sn掺杂玻璃光波导表面,研制出一种光波导气敏元件,并对氯苯蒸气进行了检测。室温下该敏感元件对于体积分数为4×10-6的氯苯蒸气有很明显响应。
SnO2 composite film incorporated with different mass fraction of La2O3 was developed as a sensitive reagent ; the optical properties of the thin films exposed to various volatile organic compounds saturated steam were studied by VIS spectra. 3.0 % La2O3 （ mass fraction） SnO2 thin film is more special,and the composite film is chosen as sensitive reagent and fixed on the surface of optical waveguide, to develop a kind of optical waveguide gas-sensing element. This element responses significantly to 4 ×10^-6（ volume fraction）of ehlorobenzene vapor.
出处
《传感器与微系统》
CSCD
北大核心
2010年第8期12-14,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(20665004
209650008)
