陶瓷共烧结极限电流氧气传感器

Limiting current type of oxygen sensor with co-fired ceramic technology

利用陶瓷共烧结技术研制了一种极限电流氧气传感器。这种传感器为一体式结构,制作工艺与传统工艺相比,无需玻璃封接工艺,就能实现良好的性能,提高了产品的可靠性,并大大降低了制作成本。所制得的传感器敏感芯体尺寸为4mm×7 mm,厚度仅为0.4 mm,并形成一个厚度约为50μm的内腔室,扩散孔直径约10μm。传感器性能通过实验验证,功耗可以达到1.8 W以下,能够测量体积分数为0%～90%的氧气,响应时间低于10 s,测量误差在0.8%以内。

Co-fired ceramic technology was used to develop a kind of limiting current type of oxygen sensor. Compared with traditional technology, it doesn＇ t need glass sealing process. The limiting current type of oxygen sensor has the advantages of high reliability as well as low cost. The size of the sensitive chip was 4mm × 7 mm, whereas the thickness was only 0.4 mm. Furthermore,the height of the air-tight inner cavity was 50 μm ,while the diameter of diffusion hole was 10 μm. According to the experiments verification, power consumption of this oxygen sensor was even lower than 1.8W. The volume fraction oxygen test range was 0 % -90 % ; the response time was within 10 s and the measuring error is within 0.8 %