摘要
介绍了一种制作陶瓷内腔室的工艺方法,该方法可以应用于制作氧化锆氧气传感器内部的气体腔室,包含极限电流氧气传感器、分压型氧气传感器等,并可以对腔室体积自由控制,屏弃了传统方法利用玻璃封接来实现的工艺步骤。以极限电流氧气传感器为例,研究了内腔室结构对传感器的性能影响,对提高氧气传感器的响应时间和可靠性具有指导意义。
A special technology which was used to make ceramic inner chamber of zirconia oxygen sensor such as limiting current type oxygen sensor and partial pressure type oxygen sensor was studied. This technology could control the volume of chamber freely. It abandoned traditional glass sealing process. The effect of inner chamber structure on property of limiting current type of oxygen sensor was also discussed. Generally speaking, the technology was very important to improve the response time and reliability of limiting current type of oxygen
出处
《传感器与微系统》
CSCD
北大核心
2010年第10期9-10,共2页
Transducer and Microsystem Technologies