摘要
多晶硅生产过程中的倒棒现象将给多晶硅生产企业带来巨大的经济损失和安全风险。通过对多晶硅生产中还原炉倒棒现象的总结分析,发现还原炉系统设备自身问题、硅芯质量及安装缺陷和硅棒生长中的工艺控制不当是造成还原炉发生倒棒的主要原因,通过优化还原系统设备、提高安装操作水平等措施控制和预防还原炉的倒棒问题。
The downfallen of polysilicon filaments will bring huge loss and safety hazard to producers of polysilicon.The causes for downfallen of polysilicon filaments in polycrystalline silicon CVD reactor were analyzed.The results show that the matter of CVD reactor system,the quality and setting of polysilicon filaments and the control of the operation are the main factors influencing the downfallen of polysilicon filaments.According to these different causes,optimizing CVD reactor system and improving install levels are the solutions to prevent downfallen of polysilicon filaments.
出处
《半导体技术》
CAS
CSCD
北大核心
2010年第10期994-998,共5页
Semiconductor Technology
关键词
多晶硅
还原炉
硅芯
沉积过程
倒棒
polysilicon
CVD reactor
polysilicon filaments
deposition process
downfallen of polysilicon filaments
