模糊控制在STM反馈控制中的应用

The Application of Fuzzy Control in Feedback Controlling of STM

STM是纳米尺度上进行测量的主要工具之一。反馈调节是STM仪器的主要环节。提高反馈控制精度和反馈控制速度是STM要解决的重要问题。利用模糊控制原理设计的模糊控制器在调节性能上比传统的PID调节器精度高、速度快。试验表明，这种调节方法是解决STM反馈控制中非线性问题比较好的方法之一。

The scanning tunneling microscope (STM ) is one of the metrology tools for nano-dimension. Feedback controlling is the main part of STM instruments. It's a key of STM to improve the quality of image of STM accurately and speedily. A fuzzy controller with fuzzy controlling theory is proved much better than the conventional PID controller in accuracy and rate. It's shown on experiment, it's one of the good solution to non-liner of feedback control in STM.